Open AccessInfluence of Sacrificial Mg2Si Layers and Kinetic Parameters on the Growth, Structure and Optical Properties of Thin Ca2Si Films on Silicon Substrates
Author(s) -
Н. Г. Галкин,
K. N. Galkin,
Igor M. Chernev,
O. V. Kropachev,
Dmitriy Goroshko,
S. A. Dotsenko,
E. Yu. Subbotin,
Dmitriy Migas
Publication year - 2022
Publication title -
himičeskaâ fizika i mezoskopiâ
Language(s) - English
Resource type - Journals
eISSN - 1727-0529
pISSN - 1727-0227
DOI - 10.15350/17270529.2022.2.12
Subject(s) - materials science , silicon , thin film , kinetic energy , optoelectronics , substrate (aquarium) , composite material , nanotechnology , physics , quantum mechanics , oceanography , geology