Open AccessTin Dioxide Films Obtained by High-Frequency Magnetron Sputtering with Ion-Beam Treatment
Author(s) -
A Solomennikova,
А. С. Алалыкин,
Р. М. Закирова,
И. В. Федотова,
P. N. Krylov,
G. M. Mikheev
Publication year - 2020
Publication title -
himičeskaâ fizika i mezoskopiâ
Language(s) - English
Resource type - Journals
eISSN - 1727-0529
pISSN - 1727-0227
DOI - 10.15350/17270529.2020.1.1
Subject(s) - tin dioxide , tin , sputter deposition , ion , materials science , cavity magnetron , sputtering , ion beam , optoelectronics , thin film , chemistry , metallurgy , nanotechnology , organic chemistry