Open AccessInvestigation of conditions of synthesis of thin films of silver nitride (AgNO3) in a high-frequency low-pressure discharge
Author(s) -
Олександр Камілович Шуаібов,
O.Y. Minya,
R. V. Hrytsak,
А. А. Малинина,
Z. T. Homoki
Publication year - 2022
Publication title -
fìzika ì hìmìâ tverdogo tìla
Language(s) - English
Resource type - Journals
eISSN - 2309-8589
pISSN - 1729-4428
DOI - 10.15330/pcss.23.3.491-496
Subject(s) - materials science , thin film , electrode , crystallite , nitride , sputtering , dielectric barrier discharge , substrate (aquarium) , explosive material , optoelectronics , dielectric , atmospheric pressure , chemical engineering , nanotechnology , chemistry , metallurgy , layer (electronics) , oceanography , organic chemistry , geology , engineering