Open AccessStructure and 3-D Model of a Solid State Thin-Film Magnetic Sensor
Author(s) -
Gryhoriy Barylo,
Roman Holyaka,
Tetyana Marusenkova,
Mariia Ivakh
Publication year - 2021
Publication title -
fìzika ì hìmìâ tverdogo tìla
Language(s) - English
Resource type - Journals
eISSN - 2309-8589
pISSN - 1729-4428
DOI - 10.15330/pcss.22.3.444-452
Subject(s) - hall effect sensor , magnetic field , tracking (education) , fabrication , optoelectronics , voltage , materials science , thin film , calibration , electrical engineering , electronic engineering , magnet , physics , engineering , nanotechnology , medicine , pedagogy , alternative medicine , pathology , quantum mechanics , psychology
Vector 3-D magnetic sensors form the basis of measurement devices for magnetic field mapping and magnetic tracking. Typically, such sensors utilize specific constructions based on split Hall structures (SHS). An SHS-based 3-D magnetic sensor is a bulk semiconductor integrated structure with 8 or more contacts. Combining current flow directions through the contacts and measuring the corresponding voltages, one defines projections BX, BY, BZ of the magnetic field vector. This work presents a novel design of 3-D solid state magnetic sensors that requires no insulation by p-n junctions and can be implemented by thin-film technology traditionally used for fabrication of Hall sensors including those based on InSb films. Besides, a SPICE model of the 3-D magnetic sensor is provided, which helps design the proposed sensor and refine techniques of its calibration.