Open AccessInelastic energy loss of Ar ions scattered Al2O3 surface under grazing incidence
Author(s) -
Atabek S. Ashirov,
Muzaffar Qurbanov,
I.U. Tangribergenov,
M.K. Karimov,
K.U. Otabaeva
Publication year - 2021
Publication title -
fìzika ì hìmìâ tverdogo tìla
Language(s) - English
Resource type - Journals
eISSN - 2309-8589
pISSN - 1729-4428
DOI - 10.15330/pcss.22.2.255-259
Subject(s) - ion , atomic physics , inelastic collision , scattering , inelastic scattering , collision , incidence (geometry) , surface (topology) , angle of incidence (optics) , physics , energy (signal processing) , spectroscopy , trajectory , materials science , optics , nuclear physics , mathematics , geometry , computer science , computer security , quantum mechanics , astronomy , electron
In this paper presents the investigation of the surface Al2O3 by ion scattering spectroscopy. The trajectory of small angle scattered ions calculated by the method of binary collision approximation. It was found dependence of inelastic energy loss and trajectories of scattered ions. The value of inelastic energy loss scattered ions almost depend to the angle of incidence and the geometrical parameters of surface semichannels.