Open AccessVELOCITY MAP IMAGING OF TEOS AND DEPOSITION ANALYSIS OF FEBID PROCESS IN TEOS
Author(s) -
Maria Pintea,
N.B. Mason,
Felix Hermanns
Publication year - 2020
Publication title -
proceedings of the 2020 international symposium on molecular spectroscopy
Language(s) - English
Resource type - Conference proceedings
DOI - 10.15278/isms.2020.rh09
Subject(s) - deposition (geology) , process (computing) , computer science , materials science , nanotechnology , chemical engineering , geology , engineering , paleontology , sediment , operating system