Open AccessReliability Analysis of Material Safety Data Sheets(MSDS) for Photoresist Chemicals used in some Semiconductor Factories
Author(s) -
KyungHwa Lee,
SeokYong Lee,
Yoon-Ji Choi,
Han-Young Choi
Publication year - 2016
Publication title -
han-guk saneop bogeon hakoeji
Language(s) - English
Resource type - Journals
ISSN - 2384-132X
DOI - 10.15269/jksoeh.2016.26.4.404
Subject(s) - reliability (semiconductor) , certification , government (linguistics) , agency (philosophy) , chemical safety , business , engineering , computer science , manufacturing engineering , risk analysis (engineering) , management , power (physics) , physics , quantum mechanics , economics , linguistics , philosophy , epistemology