Open AccessReview of Hazardous Agent Level in Wafer Fabrication Operation Focusing on Exposure to Chemicals and Radiation
Author(s) -
Donguk Park
Publication year - 2016
Publication title -
han-guk saneop bogeon hakoeji
Language(s) - English
Resource type - Journals
ISSN - 2384-132X
DOI - 10.15269/jksoeh.2016.26.1.1
Subject(s) - wafer , hazardous waste , wafer fabrication , semiconductor industry , semiconductor device fabrication , photolithography , radiation exposure , nanotechnology , fabrication , materials science , environmental science , waste management , engineering , medicine , manufacturing engineering , nuclear medicine , alternative medicine , pathology