Open AccessMachine Learning Approaches for Fault Detection in Semiconductor Manufacturing Process: A Critical Review of Recent Applications and Future Perspectives
Author(s) -
V. Arpitha,
Ajaya Kumar Pani
Publication year - 2022
Publication title -
chemical and biochemical engineering quarterly/chemical and biochemical engineering quarterly
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.334
H-Index - 40
eISSN - 1846-5153
pISSN - 0352-9568
DOI - 10.15255/cabeq.2021.1973
Subject(s) - semiconductor device fabrication , process (computing) , fault detection and isolation , manufacturing process , manufacturing engineering , computer science , engineering , systems engineering , reliability engineering , artificial intelligence , materials science , electrical engineering , wafer , actuator , composite material , operating system