Open AccessCarbon nanowalls in field emission cathodes
Author(s) -
А. F. Belyanin,
Vladimir Borisov,
S. A. Daghetsyan,
Stanislav A. Evlashin,
A.A. Pilevsky,
V. A. Samorodov
Publication year - 2017
Publication title -
tehnologiâ i konstruirovanie v èlektronnoj apparature
Language(s) - English
Resource type - Journals
eISSN - 2309-9992
pISSN - 2225-5818
DOI - 10.15222/tkea2017.6.34
Subject(s) - materials science , field electron emission , non blocking i/o , raman spectroscopy , layer (electronics) , annealing (glass) , methane , cathode , silicon , scanning electron microscope , analytical chemistry (journal) , electron , composite material , optoelectronics , optics , chemistry , physics , biochemistry , organic chemistry , chromatography , quantum mechanics , catalysis
The carbon nanowall (CNW) layers were grown from a gas mixture of hydrogen and methane, activated by a DC glow discharge, on Si substrates (Si/CNW layered structure). The second layer of CNW was grown either on the first layer (Si/CNW/CNW structure) or on Ni or NiO films deposited on the first CNW layer (Si/CNW/Ni/CNW and Si/CNW/NiO/CNW structures). The composition and structure of the resulting layered structures were studied using scanning electron microscopy, Raman spectroscopy, and X-ray diffractometry. It was found that annealing of Si/CNW structure in vacuum, growing of the second CNW layer on Si/CNW, as well as deposition of Ni or NiO films prior to the growing of the second CNW layer improve functional properties of field emission cathodes based on the electron-emitting CNW layers.