Open AccessDirect electron beam patterning of electro-optically active PEDOT:PSSOpen Access
Author(s)
Doshi Siddharth,
Ludescher Dominik,
Karst Julian,
Floess Moritz,
Carlström Johan,
Li Bohan,
Mintz Hemed Nofar,
Duh Yi-Shiou,
Melosh Nicholas A.,
Hentschel Mario,
Brongersma Mark,
Giessen Harald
Publication year2024
Publication title
nanophotonics
Resource typeJournals
PublisherDe Gruyter
The optical and electronic tunability of the conductive polymer poly(3,4-ethylenedioxythiophene):poly(styrene sulfonate) (PEDOT:PSS) has enabled emerging applications as diverse as bioelectronics, flexible electronics, and micro- and nano-photonics. High-resolution spatial patterning of PEDOT:PSS opens up opportunities for novel active devices in a range of fields. However, typical lithographic processes require tedious indirect patterning and dry etch processes, while solution-processing methods such as ink-jet printing have limited spatial resolution. Here, we report a method for direct write nano-patterning of commercially available PEDOT:PSS through electron-beam induced solubility modulation. The written structures are water stable and maintain the conductivity as well as electrochemical and optical properties of PEDOT:PSS, highlighting the broad utility of our method. We demonstrate the potential of our strategy by preparing prototypical nano-wire structures with feature sizes down to 250 nm, an order of magnitude finer than previously reported direct write methods, opening the possibility of writing chip-scale microelectronic and optical devices. We finally use the high-resolution writing capabilities to fabricate electrically-switchable optical diffraction gratings. We show active switching in this archetypal system with >95 % contrast at CMOS-compatible voltages of +2 V and −3 V, offering a route towards highly-miniaturized dynamic optoelectronic devices.
Keyword(s)direct electron beam lithography, metallic polymer, electrically switchable diffraction grating, PEDOT:PSS
Language(s)English
SCImago Journal Rank2.717
H-Index61
eISSN2192-8614
pISSN2192-8606
DOI10.1515/nanoph-2023-0640
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