Open AccessMicro-Faraday cup array structures fabrication in silicon using deep reactive ion etching
Author(s) -
Julfekar Arab,
Pradeep Dixit,
P.K. Brahmankar,
Raju S. Pawade,
Arvind K. Srivastava
Publication year - 2020
Publication title -
international journal of precision technology./international journal of precision technology
Language(s) - English
Resource type - Journals
eISSN - 1755-2079
pISSN - 1755-2060
DOI - 10.1504/ijptech.2020.109760
Subject(s) - fabrication , reactive ion etching , materials science , etching (microfabrication) , silicon , faraday cage , deep reactive ion etching , optoelectronics , ion , nanotechnology , chemistry , physics , medicine , alternative medicine , organic chemistry , layer (electronics) , pathology , quantum mechanics , magnetic field