Open AccessA Study on the Organic-Inorganic Multilayer Barrier Thin Films Using R2R Low-Temperature Atmospheric-Pressure Atomic Layer Deposition System
Author(s) -
JaeWook Lee,
Hyun-Bum Kim,
Kyoung-Ho Choi
Publication year - 2018
Publication title -
han'gug gi'gye ga'gong haghoeji/han-guk gigye gagong hakoeji
Language(s) - English
Resource type - Journals
eISSN - 2288-0771
pISSN - 1598-6721
DOI - 10.14775/ksmpe.2018.17.3.051
Subject(s) - atomic layer deposition , materials science , layer (electronics) , deposition (geology) , thin film , atmospheric pressure , chemical engineering , environmental chemistry , composite material , optoelectronics , nanotechnology , chemistry , meteorology , physics , geology , engineering , paleontology , sediment