Open AccessSystem calibration method for Silicon wafer warpage measurement
Author(s) -
ByoungChang Kim
Publication year - 2014
Publication title -
han'gug gi'gye ga'gong haghoeji/han-guk gigye gagong hakoeji
Language(s) - Danish
Resource type - Journals
eISSN - 2288-0771
pISSN - 1598-6721
DOI - 10.14775/ksmpe.2014.13.6.139
Subject(s) - calibration , wafer , optics , materials science , standard deviation , pixel , charge coupled device , silicon , residual , residual stress , electronic engineering , computer science , optoelectronics , physics , engineering , mathematics , algorithm , composite material , quantum mechanics , statistics