Open AccessModeling of chemical vapor deposition for growth of thin films
Author(s) -
Юрий Яковлевич Болдырев,
Кирилл Юрьевич Замотин,
Евгений Павлович Петухов
Publication year - 2012
Publication title -
bulletin of the south ural state university series computational mathematics and software engineering
Language(s) - English
Resource type - Journals
eISSN - 2410-7034
pISSN - 2305-9052
DOI - 10.14529/cmse120102
Subject(s) - realization (probability) , chemical vapor deposition , deposition (geology) , nanotechnology , visualization , process (computing) , chemical process , computer science , nanomaterials , process engineering , biochemical engineering , materials science , chemical engineering , engineering , artificial intelligence , geology , mathematics , statistics , sediment , operating system , paleontology
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