Open AccessThermal Chemically Deposited Zno Nanostructures: Influence of Post-Deposition Annealing Temperature on Ph Sensor Performance
Author(s) -
Aimi Bazilah,
Zaiki Awang,
Shafinaz Sobihana Shariffudin,
Sukreen Hana Herman
Publication year - 2018
Publication title -
international journal of engineering and technology
Language(s) - English
Resource type - Journals
ISSN - 2227-524X
DOI - 10.14419/ijet.v7i3.11.15919
Subject(s) - annealing (glass) , materials science , nanostructure , grain size , chemical engineering , deposition (geology) , chemical bath deposition , zinc , thermal treatment , nanotechnology , analytical chemistry (journal) , thin film , metallurgy , composite material , chemistry , chromatography , paleontology , sediment , engineering , biology
Zinc oxide (ZnO) nanostructures were synthesized via thermal chemical deposition (TCVD) method and applied as the sensing membrane of an extended-gate field effect transistor (EGFET) pH sensor. The ZnO nanostructures undergone a post-deposition heat treatment with the temperature ranging from 200-500 °C for 15 min in air ambient. The influence of the post-deposition heat treatment on the physical and pH sensing characteristics was investigated. The FESEM images showed that the surface morphology of the samples were dependent on post-annealing treatment. The as-deposited sample showed the biggest grain size and non-uniformed structures. Applying the post-annealing heat treatment caused the surface morphology to become denser and uniform. The most ideal temperature for the heat treatment for EGFET pH sensor application was found at 300 °C resulting in a pH sensitivity of 48.2 mV/pH with 0.9646 linearity.