Open AccessStudy and analysis of novel RF MEMS switched capacitor
Author(s) -
Kumar Vikas,
S. Sunithamani,
M Yagnika,
Sai Krishna,
S Avanthi
Publication year - 2018
Publication title -
international journal of engineering and technology
Language(s) - English
Resource type - Journals
ISSN - 2227-524X
DOI - 10.14419/ijet.v7i2.31.13392
Subject(s) - insertion loss , capacitive sensing , microelectromechanical systems , return loss , shunt (medical) , materials science , electrical engineering , capacitor , voltage , radio frequency , switched capacitor , air gap (plumbing) , optoelectronics , engineering , medicine , antenna (radio) , cardiology , composite material
In this paper we have designed and analyzed shunt capacitive fixed-fixed RF MEMS switch to maintain low actuation voltage. The pull - in voltage of the proposed switch is 7.7V for 2 um air gap. The electromagnetic analysis for the designed structure is, return loss is -23dB in the range of 1-40 GHz, insertion loss is -0.04dB at a frequency range of 1-40 GHz and isolation is - 38.5dB obtained at a frequency of 23.5 GHz. Mechanical analysis for the designed structure is also performed using FEM tool.