Open AccessRoom Temperature Plasma-Etching and Surface Passivation of Far-Ultraviolet Al Mirrors Using Electron Beam Generated Plasmas
Author(s) -
David R. Boris
Publication year - 2021
Publication title -
svc ... annual technical conference proceedings - society of vacuum coaters. technical conference/proceedings of the annual technical conference/society of vacuum coaters technical conference proceedings
Language(s) - English
Resource type - Conference proceedings
ISSN - 0737-5921
DOI - 10.14332/svc21.proc.0064
Subject(s) - plasma , passivation , materials science , cathode ray , etching (microfabrication) , electron , plasma etching , atomic physics , ultraviolet , far ultraviolet , optoelectronics , physics , layer (electronics) , nanotechnology , spectral line , nuclear physics , astronomy
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