Open AccessOn the Interaction of a Microwave Excited Oxygen Plasma with a Jet of Precursor Material for Deposition Applications
Author(s) -
Ralf Methling,
F. Hempel,
M. Baeva,
T. Trautvetter,
Hardy Baierl,
Rüdiger Foest
Publication year - 2019
Publication title -
plasma physics and technology
Language(s) - English
Resource type - Journals
eISSN - 2336-2634
pISSN - 2336-2626
DOI - 10.14311/ppt.2019.3.243
Subject(s) - plasma torch , plasma , nozzle , plume , deposition (geology) , jet (fluid) , substrate (aquarium) , microwave , materials science , analytical chemistry (journal) , atmospheric pressure plasma , quartz , torch , plasma processing , torr , chemistry , composite material , aerospace engineering , environmental chemistry , paleontology , oceanography , physics , quantum mechanics , sediment , welding , biology , geology , engineering , thermodynamics
A plasma source based on a microwave discharge at atmospheric pressure is used to produce an oxygen plasma torch. An admixture of liquid precursor material is evaporated and injected into the torch through a nozzle, causing oxidization and deposition of doped silica at a nearby quartz substrate. The temperature generated inside the plasma source and in the plume, in the region of treatment, and at the substrate surface are key parameters, which are needed for process description and optimization of plasma-chemical reactions. Optical emission spectroscopy, high-speed imaging, and thermography were applied to observe and to characterize the jet behavior and composition. The experimental results are compared with self-consistent modeling.