Open AccessFEASIBILITY STUDY OF MICRO-LATTICE STRUCTURES BY MULTIPHOTON LITHOGRAPHY
Author(s) -
Markus A. Wimmer,
Zoltán Major
Publication year - 2019
Publication title -
acta polytechnica ctu proceedings
Language(s) - English
Resource type - Journals
ISSN - 2336-5382
DOI - 10.14311/app.2019.25.0083
Subject(s) - lithography , materials science , fabrication , maskless lithography , laser , wavelength , photolithography , monomer , polymerization , lattice constant , optics , lattice (music) , optoelectronics , nanotechnology , electron beam lithography , resist , layer (electronics) , polymer , physics , diffraction , composite material , medicine , alternative medicine , pathology , acoustics
The paper describes the possibilities of additive manufacturing with multiphoton lithography. The basis of this technology is that a laser beam (with a certain wavelength) is red into the mixture of a monomer and a photo-initiator. When the energy of the laser is high enough, the latter acts as a catalyser for the polymerization of the monomer compound. This study focuses on the inuences of certain parameters of the multiphoton lithography process. One of the important aspects is the choice of the solvent for the post processing. In sequence to the solvent problem, the inuence of the layer height is examined. Furthermore the limits and possibilities of the setup in use are investigated. As an example the dierences in fabrication with the laser ring with "constant frequency" and "constant density" were subject of this investigation. The second goal of the study was to compare three dierent structures consisting of periodically repeating elements, scaled in size and number of elements per side.