Open AccessInP-HEMT-based Tera-Hertz-band IC Fabrication Technology For Beyond 5G/6G Application
Author(s) -
Takuya TSUTSUMI,
Hiroki Sugiyama,
Hiroshi Hamada,
Hiroyuki Takahashi,
Hideaki MATSUZAKI
Publication year - 2022
Publication title -
vacuum and surface science
Language(s) - Uncategorized
Resource type - Journals
eISSN - 2433-5843
pISSN - 2433-5835
DOI - 10.1380/vss.65.258
Subject(s) - high electron mobility transistor , tera , fabrication , optoelectronics , terahertz radiation , materials science , heterojunction bipolar transistor , epitaxy , hertz , wireless , electrical engineering , transistor , engineering , physics , telecommunications , nanotechnology , bipolar junction transistor , medicine , alternative medicine , quantum mechanics , voltage , pathology , layer (electronics)
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