Open AccessChemical Vapor Deposition of Atomically-thin Layered and Wired Transition Metal Chalcogenides
Author(s) -
Yasumitsu MIYATA
Publication year - 2022
Publication title -
vacuum and surface science
Language(s) - English
Resource type - Journals
eISSN - 2433-5843
pISSN - 2433-5835
DOI - 10.1380/vss.65.196
Subject(s) - chemical vapor deposition , nanotechnology , materials science , transition metal , wafer , thin film , nanostructure , atomic layer deposition , oxide , combustion chemical vapor deposition , deposition (geology) , nanoscopic scale , carbon film , chemistry , metallurgy , catalysis , organic chemistry , paleontology , sediment , biology
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