Open AccessAtomically Controllable Synthesis of Novel Materials Using Chemical Vapor Deposition
Author(s) -
Toshitaka Kubo,
Masaki Tanemura
Publication year - 2022
Publication title -
vacuum and surface science
Language(s) - English
Resource type - Journals
eISSN - 2433-5843
pISSN - 2433-5835
DOI - 10.1380/vss.65.168
Subject(s) - chemical vapor deposition , nanotechnology , graphene , nanomaterials , materials science , deposition (geology) , sediment , biology , paleontology
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