Open AccessLow-Temperature Formation of Indium Oxide Thin-Film using Excimer Light by Solution Process and Characterization of Thin-Film Transistor Characteristics
Author(s) -
Kazuyori Oura,
Hideo Wada,
Masatoshi Koyama,
Toshihiko Maemoto,
Shigehiko Sasa Shigehiko Sasa,
Noritaka TAKEZOE,
A. Shimizu,
Hiroyasu Ito
Publication year - 2022
Publication title -
vacuum and surface science
Language(s) - English
Resource type - Journals
eISSN - 2433-5843
pISSN - 2433-5835
DOI - 10.1380/vss.65.139
Subject(s) - thin film transistor , materials science , excimer , irradiation , thin film , optoelectronics , fabrication , oxide , indium , nanotechnology , optics , layer (electronics) , metallurgy , laser , physics , medicine , alternative medicine , pathology , nuclear physics
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