Open AccessSilicon Photonics Using Heterogeneous Integration for Society 5.0
Author(s) -
Mitsuru Takenaka,
Shinichi Takagi
Publication year - 2021
Publication title -
vacuum and surface science
Language(s) - Uncategorized
Resource type - Journals
eISSN - 2433-5843
pISSN - 2433-5835
DOI - 10.1380/vss.64.68
Subject(s) - photonics , interconnection , phase shift module , silicon photonics , optoelectronics , materials science , block (permutation group theory) , photonic integrated circuit , computer science , electronic engineering , telecommunications , engineering , insertion loss , geometry , mathematics
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