Open AccessFuture Perspectives of Si Electronics and Heterogeneous Integration
Author(s) -
Toshiro Hiramoto
Publication year - 2021
Publication title -
vacuum and surface science
Language(s) - English
Resource type - Journals
eISSN - 2433-5843
pISSN - 2433-5835
DOI - 10.1380/vss.64.62
Subject(s) - electronics , systems engineering , nanotechnology , engineering physics , engineering , computer science , materials science , electrical engineering
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