Open AccessAging Analysis of Reference Sample Surface Using Helium Ion Microscopy
Author(s) -
Keiko Onishi,
Shoko Nagano,
Daisuke Fujita,
Taro Yakabe,
Akiko N. Itakura
Publication year - 2021
Publication title -
hyomen to shinku
Language(s) - English
Resource type - Journals
eISSN - 2433-5843
pISSN - 2433-5835
DOI - 10.1380/vss.64.424
Subject(s) - scanning electron microscope , helium , field ion microscope , ion , secondary electrons , ion beam , materials science , focused ion beam , microscopy , electron beam induced deposition , electron microscope , scanning confocal electron microscopy , ion beam analysis , atomic physics , analytical chemistry (journal) , optics , electron , chemistry , scanning transmission electron microscopy , physics , nuclear physics , organic chemistry , chromatography , composite material