Open AccessStudies on Composition and Optical Properties of β-FeSi2 Thin Film Prepared by Co-sputtering
Author(s) -
Xuanwei Zhang,
Samir Kumar,
Kyoko Namura,
Motofumi Suzuki
Publication year - 2021
Publication title -
vacuum and surface science
Language(s) - English
Resource type - Journals
eISSN - 2433-5843
pISSN - 2433-5835
DOI - 10.1380/vss.64.418
Subject(s) - sputtering , materials science , thin film , composition (language) , chemical engineering , analytical chemistry (journal) , metallurgy , nanotechnology , chemistry , environmental chemistry , engineering , art , literature
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