Open AccessFeatures and Structure of Diaphragm Type Vacuum Pump
Author(s) -
Hiroshi Hayashi
Publication year - 2021
Publication title -
vacuum and surface science
Language(s) - English
Resource type - Journals
eISSN - 2433-5843
pISSN - 2433-5835
DOI - 10.1380/vss.64.179
Subject(s) - diaphragm (acoustics) , vacuum pump , reciprocating motion , diaphragm pump , electronics , materials science , reciprocating pump , ultra high vacuum , mechanical engineering , electrical engineering , engineering , nanotechnology , hydraulic pump , micropump , loudspeaker , gas compressor
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