Open AccessPrinciple and Technology of Capacitance Diaphragm Gauge
Author(s) -
Hisayuki Onuma
Publication year - 2021
Publication title -
hyomen to shinku
Language(s) - English
Resource type - Journals
eISSN - 2433-5843
pISSN - 2433-5835
DOI - 10.1380/vss.64.174
Subject(s) - diaphragm (acoustics) , gauge (firearms) , pressure measurement , microelectromechanical systems , capacitance , measure (data warehouse) , acoustics , materials science , vibration , mechanics , physics , mechanical engineering , engineering , computer science , optoelectronics , electrode , metallurgy , quantum mechanics , database