Open AccessPrinciple and Technology of Capacitance Diaphragm Gauge
Author(s) -
Hisayuki ONUMA
Publication year - 2021
Publication title -
vacuum and surface science
Language(s) - English
Resource type - Journals
eISSN - 2433-5843
pISSN - 2433-5835
DOI - 10.1380/vss.64.174
Subject(s) - diaphragm (acoustics) , gauge (firearms) , pressure measurement , microelectromechanical systems , capacitance , measure (data warehouse) , acoustics , materials science , vibration , mechanics , physics , mechanical engineering , engineering , computer science , optoelectronics , electrode , metallurgy , quantum mechanics , database
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