Open Access“Print-and-Imprint” Method : Novel Nanoimprint Technology Based on Laser-Drilled Screen Printing
Author(s) -
Shunya Ito,
Masaru Nakagawa
Publication year - 2020
Publication title -
vacuum and surface science
Language(s) - Uncategorized
Resource type - Journals
eISSN - 2433-5843
pISSN - 2433-5835
DOI - 10.1380/vss.63.592
Subject(s) - nanoimprint lithography , materials science , fabrication , mold , nanotechnology , resist , laser , lithography , ultraviolet , layer (electronics) , nanolithography , laser drilling , soft lithography , optoelectronics , optics , composite material , drilling , medicine , alternative medicine , physics , pathology , metallurgy
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