Open AccessOverviews and Outlook of Functional Surface Fabrication by Nanoimprint Technology
Author(s) -
Yoshihiko Hirai
Publication year - 2020
Publication title -
vacuum and surface science
Language(s) - English
Resource type - Journals
eISSN - 2433-5843
pISSN - 2433-5835
DOI - 10.1380/vss.63.566
Subject(s) - fabrication , materials science , nanotechnology , nanoimprint lithography , medicine , alternative medicine , pathology
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