Open AccessElectrostatic Vibrational MEMS Energy Harvester with Thin Film Electrets
Author(s) -
Hiroshi Toshiyoshi,
Hiroaki Honma,
Hiroyuki Mitsuya,
Gen Hashiguchi
Publication year - 2020
Publication title -
vacuum and surface science
Language(s) - English
Resource type - Journals
eISSN - 2433-5843
pISSN - 2433-5835
DOI - 10.1380/vss.63.223
Subject(s) - electret , microelectromechanical systems , materials science , fabrication , optoelectronics , electric potential energy , energy harvesting , capacitor , silicon , anodic bonding , surface micromachining , electrode , voltage , electrical engineering , energy (signal processing) , composite material , engineering , chemistry , physics , medicine , alternative medicine , pathology , quantum mechanics
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