Open AccessLow–pressure Deposition of CoPtCr–SiO<sub>2</sub> Granular Films by Ar＋O<sub>2</sub> Reactive Sputtering Using CoPtCrSi Target
Author(s) -
Shogo Sasaki,
Kim Kong Tham,
Shintaro Hinata,
Shin Saito
Publication year - 2018
Publication title -
hyomen to shinku
Language(s) - English
Resource type - Journals
eISSN - 2433-5843
pISSN - 2433-5835
DOI - 10.1380/vss.61.469
Subject(s) - sputtering , materials science , deposition (geology) , analytical chemistry (journal) , thin film , chemistry , nanotechnology , chromatography , paleontology , sediment , biology