Open AccessAnticipating, measuring, and minimizing MEMS mirror scan error to improve laser scanning microscopy's speed and accuracy
Author(s) -
John Giannini,
Andrew G. York,
Hari Shroff
Publication year - 2017
Publication title -
plos one
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.99
H-Index - 332
ISSN - 1932-6203
DOI - 10.1371/journal.pone.0185849
Subject(s) - microelectromechanical systems , raster scan , deconvolution , laser scanning , standard deviation , impulse (physics) , optics , computer science , materials science , artificial intelligence , biomedical engineering , laser , physics , mathematics , optoelectronics , engineering , quantum mechanics , statistics
We describe a method to speed up m icro e lectro m echanical s ystem (MEMS) mirror scanning by > 20x, while also improving scan accuracy. We use Landweber deconvolution to determine an input voltage which would produce a desired output, based on the measured MEMS impulse response. Since the MEMS is weakly nonlinear, the observed behavior deviates from expectations, and we iteratively improve our input to minimize this deviation. This allows customizable MEMS angle vs. time with <1% deviation from the desired scan pattern. We demonstrate our technique by optimizing a point scanning microscope’s raster patterns to image mammal submandibular gland and pollen at ~10 frames/s.