Open AccessFoundry-processed optomechanical photonic integrated circuits
Author(s) -
Marcel W. Pruessner,
Dmitry A. Kozak,
Nathan A. Tyndall,
William S. Rabinovich,
Venkatesh Deenadayalan,
Michael L. Fanto,
Stefan F. Preble,
Todd H. Stievater
Publication year - 2021
Publication title -
osa continuum
Language(s) - Uncategorized
Resource type - Journals
ISSN - 2578-7519
DOI - 10.1364/osac.419410
Subject(s) - optomechanics , photonics , photonic integrated circuit , fabrication , interferometry , electronic circuit , physics , optoelectronics , resonator , optics , medicine , alternative medicine , pathology , quantum mechanics