Open AccessMaskless lithography for versatile and low cost fabrication of polymer based micro optical structures
Author(s) -
Muhammad Shaukat Khan,
Roland Lachmayer,
Bernhard Roth
Publication year - 2020
Publication title -
osa continuum
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.592
H-Index - 8
ISSN - 2578-7519
DOI - 10.1364/osac.400056
Subject(s) - fabrication , materials science , image stitching , cladding (metalworking) , lithography , photonics , waveguide , nanoimprint lithography , optics , optoelectronics , embossing , diffraction grating , grating , physics , medicine , alternative medicine , pathology , metallurgy
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