Open AccessSingle crystal diamond blazed diffraction gratings and Fresnel microlens arrays with improved optical performance by high-resolution 3D laser lithography and pattern transfer by dry etching
Author(s) -
Adrien Toros,
Nathanaël Restori,
Marcell Kiss,
Toralf Scharf,
Niels Quack
Publication year - 2019
Publication title -
osa continuum
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.592
H-Index - 8
ISSN - 2578-7519
DOI - 10.1364/osac.2.003374
Subject(s) - materials science , optics , microlens , diffraction efficiency , dry etching , lithography , optoelectronics , reactive ion etching , fresnel diffraction , etching (microfabrication) , diffraction , diffraction grating , grating , nanotechnology , lens (geology) , physics , layer (electronics)