Open AccessSiNx bilayer grating coupler for photonic systems
Author(s) -
Eng Wen Ong,
Nicholas M. Fahrenkopf,
Douglas Coolbaugh
Publication year - 2018
Publication title -
osa continuum
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.592
H-Index - 8
ISSN - 2578-7519
DOI - 10.1364/osac.1.000013
Subject(s) - materials science , optoelectronics , grating , excimer laser , optics , photonics , chemical vapor deposition , fusion splicing , excimer , bilayer , wafer , output coupler , laser , fiber , resonator , chemistry , biochemistry , physics , membrane , composite material
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