Open AccessSiNx bilayer grating coupler for photonic systems
Author(s) -
Eng Wen Ong,
Nicholas M. Fahrenkopf,
Douglas Coolbaugh
Publication year - 2018
Publication title -
osa continuum
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.592
H-Index - 8
ISSN - 2578-7519
DOI - 10.1364/osac.1.000013
Subject(s) - grating , bilayer , photonics , materials science , optoelectronics , optics , physics , chemistry , biochemistry , membrane