Open AccessFemtosecond laser micromachining for stress-based figure correction of thin mirrors
Author(s) -
Heng Zuo,
Ralf K. Heilmann,
Mark L. Schattenburg
Publication year - 2022
Publication title -
optica
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 5.074
H-Index - 107
ISSN - 2334-2536
DOI - 10.1364/optica.461870
Subject(s) - femtosecond , laser , materials science , thin film , stress (linguistics) , optics , surface micromachining , deformable mirror , fabrication , physics , adaptive optics , nanotechnology , linguistics , philosophy , medicine , alternative medicine , pathology
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