Open AccessFemtosecond laser micromachining for stress-based figure correction of thin mirrors
Author(s) -
Heng Zuo,
Mark L. Schattenburg,
Ralf K. Heilmann
Publication year - 2022
Publication title -
optica
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 5.074
H-Index - 107
ISSN - 2334-2536
DOI - 10.1364/optica.461870
Subject(s) - femtosecond , laser , materials science , optics , thin film , stress (linguistics) , surface micromachining , deformable mirror , fabrication , physics , adaptive optics , nanotechnology , linguistics , philosophy , medicine , alternative medicine , pathology