Open AccessLow-cost electrothermally actuated MEMS mirrors for high-speed linear raster scanning
Author(s) -
Bibek Samanta,
F. Pardo,
T. Salamon,
R. F. Kopf,
Michael S. Eggleston
Publication year - 2022
Publication title -
optica
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 5.074
H-Index - 107
ISSN - 2334-2536
DOI - 10.1364/optica.446407
Subject(s) - microelectromechanical systems , raster scan , raster graphics , materials science , optics , optoelectronics , computer science , physics , computer graphics (images)
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