Open AccessLow-cost electrothermally actuated MEMS mirrors for high-speed linear raster scanning
Author(s) -
Bibek Samanta,
F. Pardo,
T. Salamon,
R. F. Kopf,
Michael S. Eggleston
Publication year - 2022
Publication title -
optica
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 5.074
H-Index - 107
ISSN - 2334-2536
DOI - 10.1364/optica.446407
Subject(s) - algorithm , computer science , materials science , analytical chemistry (journal) , chemistry , chromatography