Open AccessHeterogeneous silicon nitride photonics
Author(s) -
Hyundai Park,
Chong Zhang,
Minh A. Tran,
Tin Komljenović
Publication year - 2020
Publication title -
optica
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 5.074
H-Index - 107
ISSN - 2334-2536
DOI - 10.1364/optica.391809
Subject(s) - photonics , optoelectronics , silicon nitride , wafer , materials science , nitride , silicon photonics , laser , wavelength , photonic integrated circuit , silicon , optics , nanotechnology , physics , layer (electronics)