Open Access
Micro lens fabrication by means of femtosecond two photon photopolymerization
Author(s) -
Rui Guo,
Sun Xiao,
Xiaofan Zhai,
Jiawen Li,
Andong Xia,
Wenhao Huang
Publication year - 2006
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/opex.14.000810
Subject(s) - optics , femtosecond , fabrication , materials science , lens (geology) , fresnel lens , photopolymer , laser , optoelectronics , polymerization , physics , medicine , alternative medicine , pathology , composite material , polymer
We report the fabrication of micro lens using an alternative annular scanning mode with continuous variable layer thickness by two-photon polymerization after multi-parameter optimization. Laser scanning mode and scanning pace parameter are optimized to achieve good appearance. As examples of the results, a 2 x 2 micro spherical lens array with diameter of 15 microm and a micro Fresnel lens with diameter of 17 microm are fabricated. Their optical performances are also tested. Compared to the conventional femtosecond two-photon fabrication, this work provides an alternative, effective and cheap processing method for the fabrication of micro optic device that requires arbitrary shape with high surface quality and small scale.