Fabrication of a high-resolution periodical structure using a replication process | Zendy

Wei Ching Chuang | Zendy; Chi Ting Ho | Zendy; Wei-Chih Wang | Zendy

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Fabrication of a high-resolution periodical structure using a replication process

Author(s) -

Wei Ching Chuang,

Chi Ting Ho,

Wei-Chih Wang

Publication year - 2005

Publication title -

optics express

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 1.394

H-Index - 271

ISSN - 1094-4087

DOI - 10.1364/opex.13.006685

Subject(s) - polydimethylsiloxane , grating , materials science , holography , optics , fabrication , photoresist , replication (statistics) , holographic grating , epoxy , diffraction grating , molding (decorative) , mold , optoelectronics , composite material , medicine , statistics , physics , alternative medicine , mathematics , pathology , layer (electronics)

We describe a procedure for rapidly and conveniently prototyping a periodic structure at submicrometer order using holographic interferometry and micro-molding processes. In this experiment, the master of the periodic structure was created on an i-line submicrometer positive photoresist film by a holographic interference using a He-Cd (325nm) laser. A subsequent mold using polydimethylsiloxane (PDMS) polymer was cast against this master and used as a stamp to transfer the grating pattern onto a UV cure epoxy. The technique shows accurate control for the transferring of a grating's period and depth. The grating pattern on the epoxy produced by the PDMS mold shows an average of less than 2% error in the grating period and an average of 15% error in depth reproduction.

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