Open AccessFabrication of a high-resolution periodical structure using a replication process
Author(s) -
Wei Ching Chuang,
Chi-Ting Ho,
Wei Chih Wang
Publication year - 2005
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/opex.13.006685
Subject(s) - polydimethylsiloxane , grating , materials science , holography , optics , fabrication , photoresist , replication (statistics) , holographic grating , epoxy , diffraction grating , molding (decorative) , mold , optoelectronics , composite material , medicine , statistics , physics , alternative medicine , mathematics , pathology , layer (electronics)
We describe a procedure for rapidly and conveniently prototyping a periodic structure at submicrometer order using holographic interferometry and micro-molding processes. In this experiment, the master of the periodic structure was created on an i-line submicrometer positive photoresist film by a holographic interference using a He-Cd (325nm) laser. A subsequent mold using polydimethylsiloxane (PDMS) polymer was cast against this master and used as a stamp to transfer the grating pattern onto a UV cure epoxy. The technique shows accurate control for the transferring of a grating's period and depth. The grating pattern on the epoxy produced by the PDMS mold shows an average of less than 2% error in the grating period and an average of 15% error in depth reproduction.