Open AccessSurface measurement based on chessboard-shaped 2-D Ronchi grating method
Author(s) -
Boxiong Wang,
Huacheng Chen,
Xi Luo,
Chao Yu,
Zhenjiang Liu
Publication year - 2005
Publication title -
optics express
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/opex.13.005308
Subject(s) - optics , grating , surface (topology) , diffraction grating , blazed grating , materials science , physics , geometry , mathematics
A method for surface profile measurement using a chessboard-shaped 2-D Ronchi grating is proposed. The gradients in two orthogonal directions of the measured surface can be obtained simultaneously using a chessboard-shaped 2-D Ronchi grating, so that it is possible to reconstruct the surface profile by means of only one Ronchigram with high accuracy. The measuring principle and the design of the chessboard-shaped 2-D Ronchi grating are described. Measurements of both stationary and varying surfaces using an instrument constructed on the basis of the method were conducted with satisfactory results.