Open AccessImprovement of the optical coating process by cutting layers with sensitive monitoring wavelengths
Author(s) -
Cheng Chung Lee,
Kai Wu,
Chien Cheng Kuo,
Sheng Hui Chen
Publication year - 2005
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/opex.13.004854
Subject(s) - optics , coating , wavelength , materials science , compensation (psychology) , process (computing) , optical coating , optoelectronics , computer science , physics , nanotechnology , psychology , psychoanalysis , operating system
For costly optical coatings, a precise monitoring method is necessary. A new monitoring method based on the selection of the most sensitive monitor wavelength is proposed. The most sensitive monitor wavelength is easy to find by a numerical analysis. The equation for the thickness compensation when a layer is over-shot or under-shot was derived. Several examples, including narrow-band pass filters, have been given to demonstrate that this new method is superior to the turning point method in the coating process.