Open AccessFabrication of a periodic structure with a high refractive-index difference by femtosecond laser pulses
Author(s) -
Nobuhito Takeshima,
Yutaka Kuroiwa,
Yoshihiro Narita,
Shuhei Tanaka,
Kazuyuki Hirao
Publication year - 2004
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/opex.12.004019
Subject(s) - femtosecond , materials science , optics , laser , refractive index , irradiation , optoelectronics , ultrashort pulse , diffraction , physics , nuclear physics
A microfabrication process using ultrafast laser pulses in glass was investigated. We investigated the formation of semiconductors by the irradiation of glasses with femtosecond laser pulses. ZnS- or PbS-doped SiO(2)-Al2O(3)-B(2)O(3)-CaO-ZnO-Na(2)O-K(2)O glasses were prepared by a melting method and irradiated by femtosecond laser pulses. Periodic structures in the sample glasses with a high refractive index difference were produced by femtosecond laser pulses. The maximum relative refractive index difference between the irradiated area and the nonirradiated areas was 20%. Diffraction gratings were also fabricated inside the ZnS- or PbS-doped silicate glasses. The diffraction efficiency of these gratings was approximately 90% in the infrared region.