Open AccessOptical properties of injection molded subwavelength gratings
Author(s) -
Jacob C. Jonsson,
Fredrik Nikolajeff
Publication year - 2004
Publication title -
optics express
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/opex.12.001924
Subject(s) - optics , transmittance , materials science , diffraction efficiency , diffraction grating , diffraction , electron beam lithography , grating , lithography , optoelectronics , wavelength , reflection (computer programming) , blazed grating , holography , resist , physics , nanotechnology , layer (electronics) , computer science , programming language
We have fabricated injection molded subwavelength gratings for anti-reflection purposes superimposed upon a blazed grating structure in polycarbonate. The gratings are initially formed by electron-beam lithography and subsequently replicated using injection molding. There are several problems when trying to optically characterize a component such as a blazed transmittance grating. Standard spectrophotometers are not well suited for measuring transmittance in the different diffraction orders individually. Our sample size of 0.8x0.8 mm(2) is also a problem for standard instruments. First order transmittance has been measured for blazed gratings with single and double-sided AR-treatment and is transmittance is compared with with higher diffraction orders. Double-sided AR-treatment not only increase the total transmittance but also widens the wavelength range with high effectiveness of the first order diffraction.