Open AccessLow propagation loss of 0.76 dB/mm in GaAs-based single-line-defect two-dimensional photonic crystal slab waveguides up to 1 cm in length
Author(s) -
Yoshimasa Sugimoto,
Yu Tao,
Naoki Ikeda,
Y. Nakamura,
Kiyoshi Asakawa,
Kuon Inoue
Publication year - 2004
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/opex.12.001090
Subject(s) - materials science , optics , photonic crystal , etching (microfabrication) , waveguide , slab , gallium arsenide , surface roughness , layer (electronics) , optoelectronics , core (optical fiber) , physics , geophysics , composite material , geology
Straight single-line-defect photonic crystal (PC) waveguides on GaAs slabs with lengths of 1, 4, and 10 mm have been fabricated. By controlling the Al content of a sacrificial AlGaAs clad layer and the wet etching duration, a PC core layer with a very smooth surface was obtained. Atomic force microscope images indicate that the roughness on the top surface is less than 1 nm. An extremely low propagation loss of 0.76 dB/mm for the GaAs-based PC waveguide was achieved.