Open AccessThermal oxidation of TiN nanocylinder arrays: effects of insulator coatings by atomic layer deposition
Author(s) -
Shinya Goya,
Shinji Murai,
Katsuhisa Tanaka
Publication year - 2019
Publication title -
optical materials express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.925
H-Index - 66
ISSN - 2159-3930
DOI - 10.1364/ome.9.004751
Subject(s) - tin , materials science , titanium nitride , atomic layer deposition , optoelectronics , conformal coating , titanium , tin dioxide , coating , thermal oxidation , layer (electronics) , plasmon , nitride , nanotechnology , metallurgy