Open AccessThermal oxidation of TiN nanocylinder arrays: effects of insulator coatings by atomic layer deposition
Author(s) -
Shinya Goya,
Shunsuke Murai,
Katsuhisa Tanaka
Publication year - 2019
Publication title -
optical materials express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.925
H-Index - 66
ISSN - 2159-3930
DOI - 10.1364/ome.9.004751
Subject(s) - tin , materials science , titanium nitride , atomic layer deposition , conformal coating , tin dioxide , thermal oxidation , titanium , optoelectronics , coating , layer (electronics) , nitride , nanotechnology , metallurgy
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